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High Density and purity Quartz products精密石英

High Density and purity Quartz products精密石英

•天虹科技提供給半導體客戶6/8/12 吋設備使用之石英類製品, 並提供客製化設計及製作(Customized )。

                                            

•產品包含高純度SiO2石英/sapphire藍寶石零件設計及製作, 提供客戶最快速及高性價比的產品。                                            

•廣泛提供服務給台灣/新加坡/馬來西亞/中國大陸/美國/歐洲半導體客戶群。                                            

•產品包含:Bell Jar/ Robot blade / shadow ring /insulator /opticalfiber/Tube ..etc                                            

•應用於半導體蝕刻(ETCH)/化學氣象沉積(CVD)/物理氣象沉積(PVD) /快速高溫製程(RTP)/離子植入(Imp) 等機台設備。

200 天虹貨號 Descriptions 分類 部門機台 OEM
0200-00406 0200-00406SA QUARTZ   BUSHING(PIKII KITS) FOR PCII QUARTZ PVD Endura AMAT
0200-00218 0200-00218SA COVER TOP QUARTZ   8" PCII QUARTZ PVD ENDURA AMAT
0200-18074 0200-18074SA SHEATH,RPSC,HDP-CVD QUARTZ CVD HDP AMAT
MB10-301634-12 MB10-301634-12ST SUSCEPTER HOLDER   HT-PRO NEW QUARTZ CVD TEL
MB10-400332-12 MB10-400332-12ST LIFTER-PIN-SI-U QUARTZ CVD TEL
0040-20561 0040-20561SA BELL JAR   PRECLEANII QUARTZ CVD AMAT
0200-02081 0200-02081SC PLATE,QUARTZ QUARTZ CVD AMAT
0200-20426 0200-20426SA INSULATOR PINLESS QUARTZ PVD ENDURA AMAT
0200-35692 0200-35692SA BLADE, 200MM   QUARTZ, EHP-CR ROBOT QUARTZ TICL4 AMAT
0200-35970 0200-35970SA OUTER SHIELD, CVD   TI QUARTZ CVD TICL4 AMAT
BB10-201849-11 BB10-201849-11ST HOLDER,CA1.0-HOLDERS   SI-U2-FIX-HT-PRO QUARTZ CVD TEL
BB10-306339-11 BB10-306339-11ST SHIELD PLATE,   QUARTZ WINDOWS QUARTZ CVD TEL
*ST-030108 ST-030108 PRODUCER FRONT END ROBOT CERAMIC BLADE QUARTZ CVD PRODUCER AMAT